[心得] Al2O3 passivation
若對太陽電池表面用Al2O3之passivation有興趣,
可參考此論文
Silicon surface passivation by atomic layer deposited Al2O3
B. Hoex, J. Schmidt, P. Pohl, M. C. M. van de Sanden, and W. M. M. Kessels
Citation: J. Appl. Phys. 104, 044903 (2008);
doi: 10.1063/1.2963707 View online: http://dx.doi.org/10.1063/1.2963707
前言詳盡
方法也完善
若能讀上個兩遍,能讀的更懂
在這個領域就會比較熟悉了
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